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Deposition of Diamond-Like Superhard Materials 87 die User müssen komplexere FragenThis book deals with the deposition of a certain class of materials, namely the diamond like superhard materials, in the form of thin films. Starting from concepts used to improve the hardness of a material, it is shown that the intrinsic hardness is highest for materials with low bond lengths, high coordination numbers, and low ionicities. It is further shown that such diamond like materials (e. g. diamond, cubic boron nitride, tetrahedrically bonded
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